BAFS4000 mass gas flow sensor

BAFS4000 series is made of micro-electro-mechanical system (MEMS) flow sensing chip, suitable for various uses of clean, relatively dry gas measurement, to realize the digitalization of equipment, intelligence and improve high safety, with the role of traditional industry innovation and improvement; Wide range of flow measurement range to meet the flow measurement needs of different equipment in the industry, high sensitivity, high reliability, high stability and low cost performance characteristics can promote the industry to energy saving and intelligent direction development.
BAFS4000 series products are based on MEMS traffic sensing unit, high precision digital processing and calibration circuit (MCU) composition, integrated high-resolution Delta-σ A/D converter and have internal calibration function Qun circuit and MCU processor together to ensure that the sensor signal real-time effective acquisition, obtain accurate traffic signal, And the corresponding compensation algorithm is processed internally, so there is no need to do any external calibration compensation, can ensure high precision flow output; Friendly digital output communication line, users can get corresponding data and information very easily; Product application range is very broad.


  • The traffic ranges from 0SLPM to 300SLPM
  • High accuracy (1.5% F.S accuracy)
  • Linear output and temperature compensation
  • Maintain long term stability with minimum zero drift
  • Solid sensing core (no surface cavities or fragile film), resistant to clogging and pressure impact
  • Analog output (1~5V) (I2C output is also available)
  • Fast response time (20ms response time)
  • The sensor is resistant to condensation


Test conditionsVIN=12±0.01VDC,Ta=25°C
Relative humidity 40%<relative humidity<60%
Temperature range-25℃ ~+85℃
Storage temperature-40℃ ~ 90℃
Impact resistant100g
Analog voltage output (3)1~5VDC
Zero voltage0.95...1~1.05VDC
Zero drift0.2%F.S
Resolution (4)0.1%F.S
Response time20~30ms  
Supply voltage (5)8~24VDC
Power supply current20~30mA
Whole materialSilicon carbide, epoxy resin, polyphenylene sulfide, FR4, silicon as seal
Flow range (1)Unit (2)Maximum flow rate (m/s)


1. The range between 10SLM and 300SLM can be customized
2. SLM: standard litres per minute. Standard conditions: 0℃ and 1 atmosphere

3. in addition, you can add two-way airflow test customization, simulation output to make corresponding changes, F(min) - F(max) corresponding to 1-5V output, 0 flow corresponding to 3V;

4. including temperature drift and linear error

5. 5V power supply voltage can be selected

Copyright @banning 2024. All rights reserved.