High performance monocrystalline silicon resonant pressure sensor
High performance monocrystal silicon resonant pressure sensor, using electromagnetic excitation and electromagnetic pickup mode work, output frequency signal, strong anti-interference ability, good stability, without MD conversion, can measure both absolute pressure and differential pressure, accuracy of 0.1%, its range can be realized according to the specific application requirements by adjusting the production process parameters.
The sensor is a high-end product of pressure sensors, very suitable for some special environment such as aviation, aerospace, meteorology, geoquality, navigation, oil well and industrial automation and other fields of pressure measurement. Once the product is successfully developed, it will break the technical blockade of the similar products from foreign countries and the monopoly of sensor chip, and fill the gap of such sensor products in our country. Moreover, there is a large market demand at home and abroad. The field of technical expertise involves microelectronic process, micromachining and other technical fields.