BAFS3000 mass gas flow sensor

BAFS3000 series mass gas flow sensor is made of micro-electro-mechanical system (MEMS) flow sensor chip, which is suitable for clean, relatively dry, low-flow gas measurement and process control for various purposes. The unique packaging technology enables the product to meet different ranges of flow. measurement, ensuring high sensitivity, high reliability, high stability and low cost.Accurate flow signal is obtained, and the corresponding compensation algorithm is processed internally, so there is no need to do any external calibration compensation to ensure high-precision flow output;


  • High accuracy (1.5% F.S accuracy)
  • Linear output and no temperature compensation required
  • Long-term stability with minimal zero drift
  • Solid-state sensing core (no surface voids or fragile membranes), resistant to clogging and pressure shocks
  • Fast response time (1ms response time)
  • Wide flow range 0sccm -2000sccm
  • Able to adapt to relatively humid gas measurement


Test ConditionsVIN=12±0.01VDC,Ta=25°C
Relative humidity40%<相对湿度<60%
Temperature range-25℃ ~+85℃
Flow range0-2500sccm可定制
Supply voltage81224V
Zero voltage output0.9811.02
Pressure resistance0.3MPa可定制
Response time1065200ms
Zero drift0.2%Year全量程
temperature drift4%0℃~50℃
Standard conditionAir, 0℃, 101.325kPa
Overall materialSilicon carbide, epoxy, polyphenylene sulfide, FR4, silicon as sealing material


  • Oxygen concentrators; respirators and respirators; nebulizers; continuous positive airway pressure (CPAP) equipment
  • Anesthesia delivery; leak detection; spectrometer; mass flow controller; communication system; environmental climate contr
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